摘要
介绍了国外引进微光管超高真空设备的系统结构、组成、设备功能及关键技术指标,得出了超高真空获得技术改进取得的结果,并对设备在国内的应用前景作了全面分析。
The article overall and systematically introduced structure of system, composition function and key technical specification of low-light-level ultra-high vacuum equipment which was imported from overseas. And it can yield the result of ultra-high vacuum by technology improvement, then a whole analysis is made for application prospect of the equipment in china.
出处
《真空电子技术》
2007年第1期51-52,55,共3页
Vacuum Electronics
关键词
微光管
超高真空
传递铟封
阴极激活
GaAs阴极
Low light level
Ultra-high vacuum
Transfer indium seal
Cathode activation
GaAs cathode
