SnO_2薄膜的形貌及其电特性分析

An analysis of the structural and electrical properties of SnO2 thin films

我们用ＰＥＣＶＤ方法制备出ＳｎＯ_２薄膜，透射电镜ＴＥＭ分析表明沉积温度由高到低时，ＳｎＯ_２膜从多晶态转变为非晶态，并且其电阻率随之增加；沉积时氧气流量增加时，ＳｎＯ_２的电阻率增加。

We have prepared SnO2 thin films at different temperatures by PECVD. Transmission electron microscopy (TEM) shows that the SnO2 thin films undergo the transition from polycrystalline to amorphous phase when the deposition temperature drops. The sheet resistance of the films lessens with rise in deposition temperature and increases with expansion in volume of oxygen flow.