摘要
对采用直流气体放电活化反应蒸发沉积法制备的氧化锡超微粒子薄膜（UPF）进行了SEMXRD及AES的表面分析，并讨论了不同基体对薄膜表面性质的影响．
Ultra fine SnO2 particle thin films were prepared by the deposition method with DC gas discharge activating reaction, and their surface structure chemical composition as well as morphologies were analysed by SEM,XRD and AES. The influence of different substrates on structure of the films was discussed.
出处
《淮北煤师院学报（自然科学版）》
1997年第2期25-29,共5页
Journal of Huaibei Teachers College(Natural Sciences Edition)
基金
煤炭高校优秀青年科学基金
关键词
薄膜
超同粒子
表面性质
氧化锡
表面结构
thin film
deposition
spheric structure
ultrafine particle (UPF)
