摘要
对稀土掺杂和复合稀土氧化物半导体电热膜的制备和薄膜特性进行了研究，并和ＳｎＯ２电热膜进行了研究对比，讨论了新型半导体电热膜的掺杂效应和电阻随温度的变化规律及导电机理．
The preparation of some kinds of semiconductor electroheating films and their characteristics are studied.The doping effect and the change of resistance with temperature are discussed.The electric conductivity mechanism is analysed from the structure of the films.
出处
《内蒙古大学学报（自然科学版）》
CAS
CSCD
1997年第4期485-488,共4页
Journal of Inner Mongolia University：Natural Science Edition
基金
内蒙古自然科学基金
关键词
半导体电热膜
稀土
掺杂
复合稀土氧化物
semiconductor electroheating film rare earth doping the plrovskite like type rare earth composite oxids electric conductivity mechanism
