用于材料表面改性的多功能等离子体浸没离子注入装置

Multi Function Plasma Immersion Ion Implantation Facility for Surface Modification of Materials

详细叙述了新近研制的多功能等离子体浸没离子注入（ＰＩＩ）装置．在装置设计中，考虑了等离子体产生手段、高压脉冲电源和真空抽气系统多项功能要求，把离子注入、涂敷和溅射沉积结合起来．该装置已实现了多种气体等离子体注入、气－固离子混合与注入、金属等离子体沉积与注入、离子束混合与离子束增强沉积等，以满足不同材料制成的不同零件对多种表面处理工艺的需要．初步应用结果证明，该装置对于改进４５号钢、Ｔｉ６Ａｌ４Ｖ和Ｃｒ４Ｍｏ４Ｖ合金的抗磨损与抗腐蚀是很有效的。

A recently developed multi function plasma immersion ion implantation facility is described in consideration of the plasma generation method, high voltage pulsed power supply and vacuum pumping systems the ion implantation has been combined with the coating and sputtering deposition in the design. Gas plasma implantation, gas solid ion mixing and implantation, metal plasma deposition and implantation, ion beam mixing and ion beam enhanced deposition have been achieved to meet the needs for many kinds of surface treatment techniques when different components made from different materials are treated. Preliminary results have proved that the facility is very effective in improving the wear and corrosion resistance of 45 # steel, Ti 6Al 4V and Cr 4Mo 4V alloy, and is a very important means or tool for surface modification of modern materials.