基于WLI原理K9基片的亚表层损伤检测

Investigation on subsurface damage detection of K9 optics

在现代激光技术的应用发展中,光学元件在其制造过程中形成的亚表层损伤是导致激光损伤的主要根源之一。光学元件亚表层的检测方法已成为光学加工领域的一个新的热点问题。利用非接触式白光干涉原理对K 9基片进行亚表层损伤检测,获得基片表面至亚表面200μm深的三维立体图和纵向截切图,并精确地确定其亚表层损伤深度,以及在不同深度范围内的损伤密度。该方法与现阶段国内常用的亚表层损伤检测方法相比,具有非破坏性、纵向检测结果精确、检测过程简单快捷等特点。

In the application of the modern laser technology, subsurface damage （SSD） on optical components generated in the manufacture process is one of major sources for laser damage. Subsurface damage detection is becoming a hot topic in optical manufacture society. With the apparatus in the lab, non-contact white light interference theory was used to detect subsurface damage of K9 optics. 3D map and portrait slice diagram were obtained to precisely determine the depth of subsurface damage and damage density at different depths. This method is non-destructive, accurate and convenient to use.