RF MEMS开关的力电耦合仿真分析

Electrostatic-Mechanical Coupled Simulation for Fixed-Fixed Beam RF MEMS Switch

设计了一种曲臂折合结构的固支梁式RF MEMS开关。并用ANSYS有限元分析软件对此结构模型及3种基本的固支梁式RF MEMS开关结构模型进行力电耦合仿真模拟。通过静态、模态分析,得出了不同开关结构的激励电压、固有频率和阻尼Q因子。通过谐振态分析和瞬态分析再现了各结构开关在高频激励电压下的工作情况,并用"位移/时间"表量化显示了固支梁在单周期内下拉、回复过程中的运动轨迹。通过数值计算和比较,结果表明:曲臂折合式开关具有较低的下拉电压和较高响应速度,以及更稳定的工作模态。

A new structure-Serpentine folded RF MEMS switch is designed in this paper. As well as three basic structures of MEMS RF fixed-fixed beam contact switches, the new structure is simulated by using ANSYS electrostatic and mechanical coupled analysis. The actuation voltage, inherence frequency, Q factor of each structure has been calculated by static and modal analysis. Then in harmonic and transient anal- ysis, several diagrams which represent the switch actuated by high frequency actuation voltage are given. And we also make a ＂Displacement/Time diagram＂ to show the pull-down ＆ pull-up tracks. According to the simulated data, the new structure model can be proved to have a lower actuation voltage and switching time. In especially, compare to the ordinary structures, it produces much smaller vibration at work time.