ZnO基透明导电薄膜制备方法研究进展

Progress of Deposition Techniques for ZnO-based Transparent Conductive Thin Films

ZnO基透明导电薄膜与掺锡氧化铟薄膜(ITO)相比,不仅性能与其相似,还具有ITO很多无法比拟的优点.因此,制备ZnO基透明导电薄膜成为当今研究热点.综述了ZnO基透明导电薄膜制备方法的研究进展,并对各自的优缺点进行了讨论.

Compared with the ITO thin film, ZnO- based transparent conductive thin film is not only similar to it in the performance, but also has the merits which are better than ITO. So the preparing of ZnO- based transparent conductive thin film becomes a hot topic. In this paper, a review on the progress of preparation methods of ZnO-based transparent conductive thin films is presented, and the advantages, disadvantages of deposition techniques are discussed in detail.