摘要
ZnO基透明导电薄膜与掺锡氧化铟薄膜(ITO)相比,不仅性能与其相似,还具有ITO很多无法比拟的优点.因此,制备ZnO基透明导电薄膜成为当今研究热点.综述了ZnO基透明导电薄膜制备方法的研究进展,并对各自的优缺点进行了讨论.
Compared with the ITO thin film, ZnO- based transparent conductive thin film is not only similar to it in the performance, but also has the merits which are better than ITO. So the preparing of ZnO- based transparent conductive thin film becomes a hot topic. In this paper, a review on the progress of preparation methods of ZnO-based transparent conductive thin films is presented, and the advantages, disadvantages of deposition techniques are discussed in detail.
出处
《辽宁大学学报(自然科学版)》
CAS
2007年第4期334-338,共5页
Journal of Liaoning University:Natural Sciences Edition
基金
辽宁大学科研启动基金资助项目(408041)
关键词
透明导电薄膜
ZNO
制备方法
电阻率
透射率
transparent conductive thin films
ZnO
deposition technique
resistivity
transmittance.