气体微流量测量及标准装置概论

Review of Gas Flow Measurement and Standard

本文全面而概略地论述了气体微流量的测量及其标准的发展和现状。着重考虑了作为气体微流量标准装置核心的恒压式气体微流量计的原理、结构、下限因素和不确定度等基本问题。简略地介绍了我们在这方面的工作和特点。

In the paper,the development and the present situation of the gas flow measurement and its standard were introduced broadly. The principle,structure,measurement limit and analyze of uncertainty of the constant pressure gas flowmeter,which was the key component of gas flow standard apparatus,were considered emphatically. The characteristic of the Gas Flow Standard Apparatus we had made were also introduced simply.