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Measurement of large aspheric surfaces by annular subaperture stitching interferometry 被引量:18

Measurement of large aspheric surfaces by annular subaperture stitching interferometry
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摘要 A new method for testing aspheric surfaces by annular subaperture stitching interferometry is introduced. It can test large-aperture and large-relative-aperture aspheric surfaces at high resolution, low cost, and high efficiency without auxiliary null optics. The basic principle of the method is described, the synthetical optimization stitching model and effective algorithm are established based on simultaneous least-square fitting. A hyperboloid with an aperture of 350 mm is tested by this method. The obtained peak-to-valley (PV) and root-mean-square (RMS) values of the surface error after stitching are 0.433A and 0.052A (A is 632.8 nm), respectively. The reconstructed surface map is coincide with the entire surface map from null test, and the difference of PV and RMS errors between them are 0.031A and 0.005A, respectively. This stitching model provides another quantitive method for testing large aspheric surfaces besides null compensation. A new method for testing aspheric surfaces by annular subaperture stitching interferometry is introduced. It can test large-aperture and large-relative-aperture aspheric surfaces at high resolution, low cost, and high efficiency without auxiliary null optics. The basic principle of the method is described, the synthetical optimization stitching model and effective algorithm are established based on simultaneous least-square fitting. A hyperboloid with an aperture of 350 mm is tested by this method. The obtained peak-to-valley (PV) and root-mean-square (RMS) values of the surface error after stitching are 0.433A and 0.052A (A is 632.8 nm), respectively. The reconstructed surface map is coincide with the entire surface map from null test, and the difference of PV and RMS errors between them are 0.031A and 0.005A, respectively. This stitching model provides another quantitive method for testing large aspheric surfaces besides null compensation.
出处 《Chinese Optics Letters》 SCIE EI CAS CSCD 2007年第11期645-647,共3页 中国光学快报(英文版)
关键词 ALGORITHMS ASPHERICS INTERFEROMETRY Light measurement Mean square error Algorithms   Aspherics   Interferometry   Light measurement   Mean square error
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