X射线衍射技术在薄膜残余应力测量中的应用

Applications of X-ray diffraction technique in the residual stress measurement of films

残余应力测量在薄膜材料研究中具有重要的意义,综述了薄膜残余应力X射线衍射技术测量的研究现状,其中介绍了强织构薄膜残余应力X射线衍射测量技术;同时对由于G bel平行光镜、毛细管元件及二维探测器等X射线功能附件的发展,以及同步辐射源X射线的应用而带来残余应力分析的新进展进行了介绍。

The article reviewed the present progress and update accomplishments of X-ray diffraction techniques in the residual stress measurement of films, and the significant role of residual stress measurement in the study of the film science was also discussed. In addition, up-to-date research and newly published work on the residual stress measurement of the highly-textured and thin films, on a basis of the advent of the high energy synchro- tron X-ray diffraction, as well as of the improving attachments such as, G6bel parallel mirror, capillary and 2D detector, etc, were briefly introduced.