摘要
本文简要描述了激光检测摩擦力显微镜的工作原理,探索出一种横向力标定的有效方法,可以从横向力信号中提取摩擦力信号,从而能够定量地对试样表面的形貌和力学性质进行纳米量级的评定,以获取微观表面真实的三维形貌图和微观摩擦系数等信息,为纳米摩擦学设计提供依据.实验结果表明,用该方法测得未清洗单晶硅表面的微观摩擦系数约为0.06,和Bhushan等人的结果吻合的很好.
A Friction Force Microscope (FFM) has been quantitatively calibrated to measure the micro - profile and friction force. The principle of the FFM is simply described. a new technique is proposed to be used in the precise measurement of the torsional angle of the cantilever caused by the friction force. The torsional stiffness of the cantilever is computed theoretically. Thus the friction force can be obtained by multiplying the torsional angle with the torsional stiffness. The mi-crofriction coefficient of single - crystal silicon (before cleaning) has been measured by the technique. Experiment shows the microfriction coefficient is about 0.06, which is identical with Bhushans' result.
出处
《润滑与密封》
EI
CAS
CSCD
北大核心
1997年第3期15-17,共3页
Lubrication Engineering
