溶胶凝胶法制备闪耀光栅及特性研究

Sol-gel used for preparation of blazed grating

采用一步催化法，制备ZrO2光敏溶胶，用提拉法形成了单层光敏凝胶膜。采用紫外光刻技术，将掩摸图形转移到光敏凝胶膜上，通过曝光角度的控制，实现具有一定倾角的闪耀光栅制备，以紫外分光光度计，红外分光光度计，原子力显微镜等方法对光敏凝胶膜及光栅图形进行了性能测试及表征。并用355nm激光系统进行衍射效率及激光损伤阈值测定。获得了周期为2μm，高度为60nm，闪耀角为3°的闪耀光栅。

A negative tone sol-gel material was applied to the fabrication of blazed grating by UV direct writing lithography. The one-step process was used to prepare ZrO2 photosensitive sol. The negative tone gel film was irradiated with high pressure mercury lamp through the mask and leached in ethyl alcohol. The surface profile was direct controlled by the UV exposure dosage and angel of incidence. As an example, a blazed grating with a period of 21an and height of 60nm was fabricated.