（Bi1/2Na1/2）0.94Ba0.06TiO3无铅压电陶瓷制备工艺研究

Study of the preparation technology of （Bi1/2Na1/2）0.94Ba0.06TiO3 lead-free piezoelectric ceramics

采用两步合成工艺制备了（Bi1/2Na1/2）0.94Ba0.06TiO3无铅压电陶瓷。利用XRD、SEM等分析技术，研究了（Bi1/2Na1/2）0.94Ba0.06TiO3陶瓷的先低温再高温的两步合成工艺，烧结工艺对陶瓷晶体结构和压电性能的影响。结果表明，两步合成工艺有利于提高陶瓷性能，其压电常数如3最大值可达155pC/N，比传统方法提高了24％。较合适的预合成工艺为：750℃/1h＋8501000℃/2～3h；该体系陶瓷具有较宽的烧结温度范围，较合适的烧结工艺为：1150～1190℃/2～3h。

Lead-free piezoelectric ceramics （Bi1/2Na1/2）0.94Ba0.06TiO3 were prepared by the two steps synthesis technique. The effects of two steps synthesis methods of low temperature firstly, then high temperature and sintering process on the structure and piezoelectric properties of （Bi1/2Na1/2）0.94Ba0.06TiO3 ceramics were investigated by XRD, SEM and other analytic methods. It showed that the piezoelectric properties were improved obviously by two steps synthesis methods, and the maximum d33-155 pC/N of （Bi1/2Na1/2）0.94Ba0.06TiO3 ceramics that is more than 24% of that of the tradition synthesis methods. The favorable two steps synthesis methods is 750℃/1h＋850～ 1000℃/2～3h, and favorable sintering process is 1150～1190℃/2～3h.