Bi3.2La0.8Ti3O12铁电薄膜在不同退火条件下的取向研究

An orientation study of Bi3.2La0.8Ti3O12 ferroelectric thin films with different annealing schedules

应用金属有机溶液沉积法在p-Si（100）基片上成功地制备了抗疲劳B也Bi3.2La0.8Ti3O12铁电薄膜。应用XRD分析研究了薄膜在各种工艺条件下的形成和取向。实验结果表明在400℃预处理10min后增大700℃退火时间可以显著增大薄膜的（200）取向，与先驱体溶液的柠檬酸含量无关。高柠檬酸含量增大薄膜的厚度并有助于未预处理薄膜的c-取向。

Fatigue-free Bi3.2La0.8Ti3O12 ferroelectric thin films were successfully prepared on p-Si（100） substrates using metalorganic solution deposition process. The orientation and formation of 5-layers thin films were studied under different technologic condition using XRD. Experiment results indicated that increase in annealing time at 700℃ after preannealing for 10min at 400℃ can remarkably increased （200）-orientation of the films either at high content of citric acid or at low content of citric acid in the precursor solution, and high content of citric acid increased the film thickness and was conducive to the a-orientation of the films with the preannealing, low concentration of the solution was conducive to the c-orientation of the films without the preannealing.