淬火对BiFeO3薄膜电效应的影响

Effects of quenching on the electric properties of BiFeO3 film

采用溶胶．凝胶法和快速退火方法在LaNiO3/Si（100）衬底上制备了BiFeO3（BFO）薄膜。研究了淬火冷却与随炉冷却两种不同的冷却方式对BiFeO3薄膜的结构、形貌与电性能的影响。XRD研究表明淬火未对薄膜的结晶产生显著的影响。扫描电镜研究表明，淬火导致薄膜表面出现了裂纹，同时粗糙度增加。铁电性测试表明，淬火冷却的薄膜的铁电性得到了增强。通过对薄膜漏电流的观察发现，淬火的薄膜的漏电流相对自然冷却的薄膜减少。

BiFeO3 （BFO） films were deposited on LaNiO3/Si（100）substrates by sol-gel method incorporated with rapid annealing process. The effects of quenching and cooling in furnace on the structure, morphology and electric property were studied. XRD results showed that there is no substantial effect to the crystallization of BFO films by quenching. Cracks and larger smoothness were observed on the surface of the quenched film and through SEM study. Enhanced ferroelectricity was identified in the quenched film by measuring the electric hysteresis loops. Moreover, leakage current was reduced in the quenched film comparing with the furnace cooled film.