FePt/B4C垂直磁记录介质薄膜的制备与表征

Preparation and characterization of FePt/B4C thin film for perpendicular magnetic recording

采用直流及射频磁控溅射结合真空退火的方法成功制备了（001）择优生长的FcPt/B4C多层薄膜并对其结构与磁性能做了初步的表征．结果表明，在每一个FbPt单元层中能得到较好（001）面择优的fet相FbPt合金，并且随着B4C含量的增大，薄膜的有序度提高．高分辨透射电子显微镜及其傅立叶变换表明，FePt层为具有（001）织构的fct相Fe55Pt45合金．样品的M-H曲线显示其垂直膜面方向矫顽力约为302.481kA/m；平行膜面方向矫顽力很小．

（001） orientated FePt/B4C multilayer films were successfully prepared by DC and RF sputtering with post-annealing in vacuum. The microstructure and magnetic properties were characterized primarily. The results indicate that in each layer of FePt, （001） preferred FePt alloy with fct phase was detected, the ordering degree increases with increasing B4C content in the films. The results of X-ray diffraction（XRD）, high resolution transmission electron microscopy（HRTEM） and fast fourier transform（FFT） confirm that each layer of FePt is （001） preferred fct phased Fe55Pt45 alloy. M-H loops reveal that the perpendicular coercivity of the film is about 302.48kA/m while parallel coercivity is quite small.