Ag纳米粒子磁控溅射制备及其热稳定性研究

Fabrication of Ag particles by magnetron sputtering and their thermal stability

利用磁控溅射在玻璃衬底上制备Ag纳米粒子及其氧化物（AgOx）薄膜，通过高温退火实验，研究银及AgOx薄膜的热稳定特性。采用x射线衍射分析薄膜的晶相结构，采用UV-Vis分光光度计测定薄膜的吸收光谱。结果表明：Ag纳米薄膜在450nm附近出现特征吸收峰，200℃退火后，峰位蓝移，400℃退火后，吸收峰显著减弱，表明Ag纳米粒子在退火过程中发生了蒸发；AgOx薄膜在200℃下退火后，出现Ag纳米粒子特征吸收峰，表明AgOx的热分解，400℃退火同样导致Ag纳米粒子的蒸发。

Silver particles and AgOx films were prepared on glass substrate by magnetron sputtering and their thermal stability was studied via annealing. The films were characterized by XRD and UV-Vis spectroscopy. It reveals that Ag nanoparticles on glass show a strong absorption peak arotmd 450 nm in the spectrum. This peak shifts to the blue after annealing at 200℃ for 2h, and it almost disappear after annealing at 400℃ for 2 h due to evaporation of Ag. On the other hand, AgOx exhibits rather low thermal stability. It is apt to decomposing to Ag at temperature not higher than 200℃.