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Ag纳米粒子磁控溅射制备及其热稳定性研究

Fabrication of Ag particles by magnetron sputtering and their thermal stability
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摘要 利用磁控溅射在玻璃衬底上制备Ag纳米粒子及其氧化物(AgOx)薄膜,通过高温退火实验,研究银及AgOx薄膜的热稳定特性。采用x射线衍射分析薄膜的晶相结构,采用UV-Vis分光光度计测定薄膜的吸收光谱。结果表明:Ag纳米薄膜在450nm附近出现特征吸收峰,200℃退火后,峰位蓝移,400℃退火后,吸收峰显著减弱,表明Ag纳米粒子在退火过程中发生了蒸发;AgOx薄膜在200℃下退火后,出现Ag纳米粒子特征吸收峰,表明AgOx的热分解,400℃退火同样导致Ag纳米粒子的蒸发。 Silver particles and AgOx films were prepared on glass substrate by magnetron sputtering and their thermal stability was studied via annealing. The films were characterized by XRD and UV-Vis spectroscopy. It reveals that Ag nanoparticles on glass show a strong absorption peak arotmd 450 nm in the spectrum. This peak shifts to the blue after annealing at 200℃ for 2h, and it almost disappear after annealing at 400℃ for 2 h due to evaporation of Ag. On the other hand, AgOx exhibits rather low thermal stability. It is apt to decomposing to Ag at temperature not higher than 200℃.
出处 《功能材料》 EI CAS CSCD 北大核心 2007年第A06期2059-2061,共3页 Journal of Functional Materials
基金 基金项目:国家高技术研究发展计划(863计划)资助项目(2007AA052431)
关键词 AG纳米粒子 磁控溅射 高温退火 光学特性 Ag nanoparticles magnetron sputtering annealing optical properties
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