纳米结构在微纳传感器应用中的介电泳操控研究

Manipulation of nano-structured using dielectrophoresis in micro-/nano-sensor

要将纳米结构作为功能元件应用在微纳传感器等电学系统中，首先要解决的问题是材料的定位操作问题。介电泳技术是一种很有潜力的纳米操控技术。在自行设计的几种电极的基础上，采用介电泳技术对微纳米材料进行操控，可以实现微纳米材料沿电场方向的排布并口电极间的跨接。初步测试了采用介电泳技术操控自行生长的纳米结构制作而成的湿度传感器的基本特性，结果表明介电泳技术可以很好地实现纳米材料在传感器领域中的应用。

One of the key problems of nano-structured materials for electronic device applications in micro-/nano-sensors is to align and manipulate them to the preset locations. Dielectrophoresis is a potential technique which can be employed for the manipulation of nano-structured materials in fluid. In this paper, with several home-made electrode pairs, we succeeded in manipulating the micro-/nano-particles along the electric field and deposited them across the gaps between two electrodes. A relative humidity sensor, using the dielectrophoretically assembled self-grew nano-materials as sensing elements, had been fabricated and the sensing properties had been tested. It confirms the dielectrophoresis can fulfill the application of nano-materials in the field of sensors.