光学表面中频误差的控制方法—确定区域修正法

Correcting errors in definite area:a new method for controlling mid-spatial-frequency errors in optical surface

提出了一种有效控制光学表面中频误差的方法——确定区域修正法。给出了确定区域修正法的基本思想和工作流程,并基于最大熵原理对抛光盘运动参数进行了优化选择(行星运动方式转速比为-1或0,偏心率为接近于0但不等于0)。最后,在Φ100 mm K9玻璃平面镜上进行了抛光对比实验。实验结果表明,应用确定区域修正法,在1.5 min内可使0.28 mm-1频率误差对应的PSD值从14.76 nm2.mm下降到3.70 nm2.mm,有效地控制了光学表面的中频误差。与其他方法相比,确定区域修正法的突出优点在于其确定性和高效性。

A new method for controlling the mid-spatial-frequency errors located in definite area in a large optical surface, correcting errors in definite area, was brought forward. The basic idea and workflow were presented. Then,the processing parameters were optimized based on the maximum entropy principle. The optimized rotate speed ratio is - 1 or 0, and the eccentricity ratio approaches 0 but not 0. Finally, a comparative experiment was done on a Φ100 mm K9 glass flat mirror. The experimental results indicate that the PSD value of 0. 28 mm^-1 frequency errors decreases from 14.76 nm^2 · mm to 3.70 nm^2 · mm within 1.5 min. The mid-spatial-frequency errors in optical surfaces can be controlled effectively by means of correcting errors in definite area. Compared with other methods, the correcting errors method in definite area has the advantages of determinacy and high-efficiency in optical machining.