摘要
目的获得较为精确的金属薄膜弹性模量E的计算公式.方法用有限元方法对修正后的Sneddon方程进行验证.结果修正后的Sneddon方程求出的弹性模量与真实的弹性模量基本吻合.结论经验证,笔者提出的Sneddon方程的修正方程计算精度更为精确.
The purpose of this paper is to obtain a more accurate equation to calculate the elastic modulus, E （Young＇s modulus） of thin metallic film. We verify the corrected Sneddon＇s equations by using the finite element method and find out that the elastic modulus derived from the corrected Sneddon＇ s equations are consistent with the true elastic modulus. We bring forward a more accurate corrected equation, and it is proved that this corrected equation is more accurate than ever before.
出处
《沈阳建筑大学学报（自然科学版）》
EI
CAS
2007年第1期29-32,共4页
Journal of Shenyang Jianzhu University：Natural Science
基金
建设部科学技术项目(06-K7-3)
国家自然科学基金项目(50571103)
关键词
弹性模量
Sneddon方程
纳米压痕
有限元
elastic modulus
Sneddon＇ s equation
nanoindentation
finite element method
