镁合金表面Ti—TiN复合镀层的阴极多弧离子制备与表征

Preparation and characterization of Ti TiN films on AZ91C by cathode multi arc ion plating

表面强化、耐蚀处理对镁及其合金的应用至关重要。采用阴极多弧离子镀膜技术，在AZ91C镁合金基底上首次成功镀制了强结合力的以Ti为过渡层的TiN复合膜层，并利用高分辨扫描电子显微镜（SEM）、X射线能谱仪（EDS）、CSM显微划痕测试等技术对复合膜层的形貌、组织结构及性能进行分析研究。结果表明，采用适当的多弧离子镀膜工艺，能在经恰当预处理方法处理的镁舍金基底上制备性能良好的TiN膜。膜层均匀、致密，膜基结合力达130mN以上，复合硬度达500HV左右（AZ91镁合金基底125HV）。此外中性盐雾强化实验表明，经该方法处理后的镁合金在ASTM-B117标准测试条件下，腐蚀速度明显降低，经过200h后，表面无明显腐蚀现象。真空多弧离子镀膜技术有望在镁合金表面防护领域得到应用。

The process of surface strengthening and corrosion resisting is very important to the application of magnesium and its alloys. TiN films growing Ti films, as interlayers were prepared on AZ91C magnesium and alloy substrates by cathode multi arc ion plating equipment. The surface topography, microstructure and hardness of the films were analyzed with high resolution scanning electron microscope （SEM）, X-ray energy dispersive spectrometers （EDS） and CSM microcharacter hardness tester. The results show that good function TiN films can be prepared on pretreated magnesium and alloy substrates by appropriate multi arc ion Plating technology. The bonding force between films and substrates is above 130mN, and the compound hardness of the films is about 500HV whereas that of AZ91C magnesium and alloy is about 125HV. The neutral salt mist strengthening experiment indicates that corrosion rate of magnesium and alloy treated by this method declines obviously under ASTM-117 standard test condition. The surface of the films is not eroded obviously after 200h salt mist experiment. Vacuum multi arc ion plating technology can be used in the area of magnesium and alloys surface protection.