摘要
We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled microoptomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure. A 160×160 array with a 120 μm×120μm pitch is fabricated and an optical readout is used to collectively measure deflections of all microcantilevers in the array. Thermal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is given statistically and is measured to be about 270mK.
We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled microoptomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure. A 160×160 array with a 120 μm×120μm pitch is fabricated and an optical readout is used to collectively measure deflections of all microcantilevers in the array. Thermal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is given statistically and is measured to be about 270mK.
基金
Supported by the National Natural Science Foundation of China under Grant Nos 10472111, 10732080 and 10627201, and the National Basic Research Programme of China under Grant No 2006CB300404.
