316L不锈钢表面沉积Pd／Fe磁性薄膜的研究

Research on deposited Pd/Fe magnetic films on the surface of 316L stainless steel

采用真空电弧离子镀技术在316L不锈钢表面沉积Pd／Fe薄膜，通过XRD衍射、SEM电镜及EDS分析了薄膜的组织结构、磁性能及电化学行为。结果显示：沉积态Pd／Fe薄膜经过500℃×15min真空扩散热处理后，薄膜由无序的fcc结构相转变成具有铁磁性的L10型fct结构的有序Pd／Fe舍金相，表面光滑均匀且致密，结合强度高，充磁后表面剩磁值达到12Gs，并且提高了材料的耐腐蚀性能。

Pd/Fe films were deposited on the surface of 316L stainless steel by vacuum arc deposition technology. The histological structure and magnetic properties were corrosion behaviors are analyzed by X-ray diffraction, SEM and electron energy spectrum. The results showed that, after diffusing heat treatment, deposited Pd/Fe films changed from fcc disorder phase to fct order phase, which had ferromagnetism. The surface of the films was smooth, compact and high bond strength. Whose value of residual magnetism was to 1.2 × 10^-4T after magnetizing, and corrosion-resisting properties was increased.