摘要
介绍了谐振式MEMS磁强计的基本原理、特点和应用领域,总结了目前谐振式磁强计方面的研究成果,给出了其技术指标和参数,分析、比较了垂直式和水平式两类谐振式MEMS磁强计的特点和优势。阐述了谐振式磁强计的驱动、信号检测及控制方式,分析了谐振式磁强计的发展趋势,指出通过合理的结构、工艺设计及提高检测精度来进一步提高器件的分辨力将是谐振式磁强计发展的主要方向。
the principle, the characteristics and the applications of the resonant magnetometer are introduced. The current research on the resonant magnetometers is summarized from the detailed performances. The characteristics and the advantages of two different types resonant MEMS magnetometers（ vertical and horizontal）are compared and analyzed. The drive and the control modes of the resonant magnetometer are explained together with the measurement methods of the sensor＇ s signal. Finally, the development trend of the resonant magnetometers is analyzed. It is indicated that the trend in the future is the improvement of its resolution through reasonable structure design, novel micromachining technologies and the enhancement of the signal detection precision.
出处
《传感器与微系统》
CSCD
北大核心
2007年第11期10-12,16,共4页
Transducer and Microsystem Technologies
基金
国家"863"计划资助项目(2006AA04Z341)
