摘要
采用正交试验法对PCVD等离子体增强化学气相沉积渗硅的工艺进行了优化。在40%SinH2n+2+60%Ar(质量分数)渗硅源中,电工钢于480℃PCVD处理40min,其表面可形成厚20μm富硅层。再经1100℃扩散1h,电工钢铁损下降49.5%,B2500提高65%,电磁性能得到极大的改善。
Orthogonal test is used to optimize the PCVD process for producing high silicon steel. The electric steel is PVCD treated at the optimal parameters: using siliconzing source of 40 %Si nH 2n+2 +60 %Ar at 480 ℃ for 40 min. The treated steel has a 20 μm thick Si enriched layer on its surface. After annealing in an atmosphere of H 2 at 1 100 ℃ for 1 h, its core loss is reduced by 49.5 % and the magnetic induction intensity is increased by 65 %. There fore, the electromagnetic properties of the electric steel can be dramatically improved.
出处
《钢铁研究学报》
CAS
CSCD
北大核心
1997年第4期42-45,共4页
Journal of Iron and Steel Research
基金
湖北省自然科学基金
关键词
PCVD法
电工钢
铁损
PCVD process,electric steel,core loss