Si纳米纤维的等离子体制备工艺

PROCESSING PREPARED Si NANOFIBER IN VACUUM ARC PLASMA

本文利用电弧等离子体蒸发制备了纳米Si纤维通过沉积温度场的调节，确定了纤维的最佳沉积温度约600℃同时表征了纤维的生长过程，在一定的温度下，Si团聚体颗粒间的“颈连接”

Si nanofiber was prepared by using arc plasma evaporation method. The experimental results revealed that one-dimension growth of the Si particle clusters was responsible for the 'neck-connection' between the particle and its surface amorphous layer.Self-diffusion between the particles and surface diffusion on layer of the particle were carried on in various deposition temperature zones.