纳米级多孔玻璃CVD改质试验研究

EXPERIMENTAL STUDY ON CVD MODIFICATION OF NANOPOROUS GLASS

采用先进的CVD技术，以TEOS／O2作为反应剂，对平均孔径约4nm的硼硅酸盐多孔玻璃进行了改质处理．在反复试验的基础上，探讨了试验条件参数优化和气体渗透分离机理等问题，获得了He／N2分离系数在室温下约为25，并随温度增高而显著增大的改质效果，提供了环保、化工等领域气体混合物分离的一种途径．

The modification of nanoporous glass is a new important technique necessary for permselectivity improvement to meet the application requirement in environment protection and chemical engineering. The author modified the borosilicate porous glass with the mean pore size of about 4 urn via the advanced Chemical Vapor Deposition(CVD) method using TEOS/O2 reactants system. On the basis of his experiments, the author discussed the optimization of adjustable experimental conditions and the mechanism of gas permeation and separation and achieved a promising modification result. The He/N2 separation factor reaches as high as 25 at room temperature and increases with the increase of the measuring temperature.