高性能InP/InP、InGaAs/InP体材料LP-MOCVD生长

Near Infra red Electroluminescence of ZnS∶Er 3+ Thin Film

给出利用低压金属有机化合物化学汽相沉积（ＬＰ－ＭＯＣＶＤ）生长技术在ＩｎＰ衬底上生长ＩｎＰ、ＩｎＧａＡｓ的条件，研究了ＩｎＰ／ＩｎＰ的生长特性、ＩｎＧａＡｓ／ＩｎＰ的组份控制、生长特性及生长温度对ＩｎＧａＡｓ特性的影响．发现ＩｎＧａＡｓ／ＩｎＰ最佳生长温度为６４０℃，得到ＩｎＧａＡｓ／ＩｎＰ１６Ｋ光荧光（ＰＬ）谱全高半峰宽为３２．０ｎｍ，ＩｎＰ／ＩｎＰ室温霍尔迁移率为４３６０ｃｍ２／Ｖｓ，背景掺杂浓度为５×１０１４ｃｍ－３，Ｘ光双晶衍射全高半峰宽为２１＂．

Near infra red electroluminescent characteristics of the zinc sulfide thin film devices doped with erbium, fabricated by thermal evaporation with two boats, are reported. The study of the microstructure of the film was carried out by using X ray diffraction method.The effects of the microstructure of the film doped with erbium on luminescence are pointed out.