摘要
采用磁控反应溅射法制备了一系列不同Al含量的Cr1-xAlxN涂层,通过能谱仪(EDS)测试涂层的成分,X射线衍射仪(XRD)表征涂层的微结构,扫描电镜(SEM)观察涂层的表面形貌,研究了Al含量对涂层的微结构和高温抗氧化性能的影响。结果表明,涂层取CrN的面心立方结构生长,且呈(111)择优取向。随着Al含量增加,涂层的晶格常数减小,涂层的高温抗氧化性能显著提高。Cr0.6356Al0.3644N涂层随着氧化温度的升高,表面的Al含量略为上升,在900℃涂层产生裂纹失效。
A series of Cr1-xAlxN coatings were deposited by reactive magnetron sputtering. The content, microstructure, surface morphology of the coatings were characterized by energy dispersive spectroscopy （ EDS ） , X-ray diffraction （ XRD ） and scanning electron microscopy （ SEM ）. The effect of Al content on the microstructure and oxidation resistance was studied. It was found that the coatings take the fcc-CrN structure with a （ 111 ） preferential orientation. The lattice constant of the coatings gradually decreases, and the oxidation resistance obviously improves with the increase of Al content, Al content on the surface of Cr0.6356Al0. 3644N coatings increases slightly with oxidation temperature raising, and the coatings fail with crack inducing at 900℃.
出处
《表面技术》
EI
CAS
CSCD
2007年第6期12-14,24,共4页
Surface Technology
基金
国家自然科学基金资助项目(50574044)
