Mn或Cu掺杂非晶AlN薄膜的光致发光特性

Photoluminescence of Cu or Mn Doped Amorphous AlN films

研究了Mn或Cu掺杂的非晶AlN薄膜在室温下的发光性质。Cu或Mn掺杂的非晶AlN薄膜是在玻璃衬底上采用中频反应磁控溅射制备的。X射线衍射（XRO）结果表明薄膜为非晶。由X射线能谱（EDX）检测分析结果得到薄膜中Cu和Al含量比例为1：10，Mn和Al含量比例为1：15。光致发光光谱表明Cu掺杂的AlN薄膜能发出强烈的蓝光（～430m）而Mn掺杂则表现为红光（～650nm）。

Luminescence of the AlN films, grown by mid-frequency magnetron sputtering and doped with Cu or Mn on glass substrate, was studied. The films were characterized with X-ray diffraction（XRD） and energy dispersive X-ray spectroscopy（EDX）. The results show that the films are amorphous and the content ratios of Cu and Al, Mn and A1 are 1 ： 10 and 1 ： 15, respectively. Moreover, strong blue light（ - 430 nm） emission was observed in Cu-doped AlN films,whereas,red light（- 650 nm） emission was observed in Mn-doped AlN films.