摘要
研究了Mn或Cu掺杂的非晶AlN薄膜在室温下的发光性质。Cu或Mn掺杂的非晶AlN薄膜是在玻璃衬底上采用中频反应磁控溅射制备的。X射线衍射(XRO)结果表明薄膜为非晶。由X射线能谱(EDX)检测分析结果得到薄膜中Cu和Al含量比例为1:10,Mn和Al含量比例为1:15。光致发光光谱表明Cu掺杂的AlN薄膜能发出强烈的蓝光(~430m)而Mn掺杂则表现为红光(~650nm)。
Luminescence of the AlN films, grown by mid-frequency magnetron sputtering and doped with Cu or Mn on glass substrate, was studied. The films were characterized with X-ray diffraction(XRD) and energy dispersive X-ray spectroscopy(EDX). The results show that the films are amorphous and the content ratios of Cu and Al, Mn and A1 are 1 : 10 and 1 : 15, respectively. Moreover, strong blue light( - 430 nm) emission was observed in Cu-doped AlN films,whereas,red light(- 650 nm) emission was observed in Mn-doped AlN films.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2007年第6期508-510,共3页
Chinese Journal of Vacuum Science and Technology
关键词
氮化铝
中频反应溅射
掺杂
光致发光
Aluminium nitride, Mid frequency reactive sputtering, Doped, Photoluminescence