电子能量损失谱及其在纳米多层膜研究中的应用

Electron Energy Loss Spectroscopy Study of a-C/Ta-C and Al/AlN Multilayers

本文介绍了电子能量损失谱的基本原理、能量过滤成像分析及应用电子能量损失谱计算碳同素异构体的电子密度和sp2键结构的含量。同时应用透射电镜(TEM)和电镜配置的能量过滤成像系统(gatan imaging filter),结合电子能量损失谱研究类金刚石(a-C/Ta-C)和Al/AlN两种纳米多层膜的形态、结构和膜中各元素的分布。结果显示透射电镜观察配合电子能量损失谱在纳米多层膜表征中将会扮演一个重要角色。

Two kinds of multilayers, a-C/Ta-C and AI/A1N, were studied with electron energy loss spectroscopy（EELS） and energy-fil- tered transmission electron microscopy（EFFEM）. The carbon atomic density was calculated and the sp2 bonding fraction was measured by EELS. We suggest that a combination of TEM and EELS works well in characterizing microstructures of nano-multilayers.