基于共振隧穿微结构的GaAs基加速度计

GaAs Accelerometer Based on Resonant Tunneling Micro-structure

介绍了一种基于共振隧穿微结构的GaAs基四梁式加速度计,设计了共振隧穿微结构以及GaAs基加速度计的结构,分析了加速度计的力学特性,讨论了加速度计的加工工艺,并利用该工艺在国内首次制作出加速度计。在分析了串联电阻的影响后,设计了加速度计的输出信号提取电路,并通过实验测试了该加速度计的线性度和灵敏度。结果表明:该加速度计的输出具有较好的线性度,而灵敏度比硅材料的最大压阻灵敏度高一个数量级,适合于高精度测试场合。

A GaAs accelerometer based on resonant tunneling micro-structure with a quad-beam was introduced, The fabric of the resonant tunneling micro-structure and the GaAs accelerometer has been designed, the mechanical characteristic of the accelerometer has been analysed, and the fabrication process has been discussed. The accelerometer was fabricated for the first time at home. The effect of serial resistance was analyzed, and the signal extracting circuit for accelerometer has been designed. Then the linearity and sensitivity of the accelerometer was measured through experiment, well output linearity and more than one order higher piezoresistive sensitivity than that of silicon are demonstrated. The accelerometer can be used in high precision situation.