半导体晶圆生产系统瓶颈识别与管理对策

Bottleneck Identification and Management in Wafer Fabrication

瓶颈资源决定着系统的产出,对瓶颈资源进行有效地管理对于资金密集的半导体晶圆生产系统具有重要的意义。由于系统波动的存在,系统瓶颈漂移现象无法避免,所以将多重入半导体晶圆生产系统瓶颈分为长期、中期、短期瓶颈,提出了识别三种系统瓶颈的方法。分析了瓶颈漂移问题产生的主要原因,同时对各个主要原因提出了相应的管理对策,最后提出了晶圆生产系统的瓶颈管理模式,并详述该管理模式之流程及其瓶颈设备缓冲管理机制。

The system throughput depends on its bottleneck resources, so effective management of bottleneck resources has great significance in the capital-concentrated re-entrant wafer fabrication. The bottleneck shifting of system can＇ t be avoided for system vibration, so the methods to identify the long-term, medium-term, short-term bottleneck of system were presented. The main causes of bottleneck shifting were analyzed, the countermeasures and a bottleneck management model were presented, the flow and the bottleneck buffer management mechanism of the model were described.