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Sol-Gel法制备Bi_4Ti_3O_(12)薄膜及其性能研究 被引量：3

Ferroelectric Properties and Fatigue of Bi_4Ti_3O_(12) Thin Films Prepared by Sol-Gel Method
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摘要 采用溶胶-凝胶(Sol-Gel)法在Pt/Ti/SiO2/Si衬底上制备了Bi4Ti3O12(BTO)铁电薄膜,利用X-射线衍射仪(XRD)和原子力显微镜(AFM)对其晶格结构和表面形貌进行了表征,制备的BTO薄膜具有单一的钙钛矿晶格结构和表面平整致密。对700℃退火的BTO薄膜进行了铁电性能和疲劳特性测试,在测试电压为6 V时,剩余极化值2Pr约为12.5μC/cm2,矫顽电场2Ec约为116.7 kV/cm;经1×109次极化反转后,剩余极化值下降了24%,对其疲劳机理进行了探讨。 The Bi4Ti3O12 thin films were fabricated on the Pt/Ti/SiO2/Si substrates using Sol-Gel method. The structure and morphology of the films were characterized by using X-ray diffractometer and atomic force microscopy. The thin films showed a perovskite phase and dense microstructure. The Bi4Ti3O12 thin films annealed at 700 ℃ showed 2Pr value of 12.5 μC/cm^2 and 2Ec value of 116.7 kV/cm at an applied voltage of 6 V. After the switching of 1× 10^9 cycles, the remanent polarization value decreased to 76% of its pre-fatigue values. The reason of the poor fatigue is discussed.
作者 郭冬云 李美亚 裴玲 于本方 吴庚柱 王耘波 杨斌 于军
机构地区 武汉大学物理科学与技术学院 华中科技大学电子科学与技术系
出处 《压电与声光》 CSCD 北大核心 2007年第6期683-685,共3页 Piezoelectrics & Acoustooptics
基金 湖北省自然科学基金资助项目(2003ABA061 2004ABA082)
关键词 Bi4Ti3O12薄膜 溶胶-凝胶(Sol—Gel)法 铁电性能 疲劳性能 Bi4Ti3O12 thin film, Sol-Gel method ferroelectric properties fatigue
分类号 TN304 [电子电信—物理电子学]
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参考文献9

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共引文献15

同被引文献36

  • 1高峰,张昌松,张慧君,田长生.熔盐法制备Bi_4Ti_3O_(12)的研究[J].压电与声光,2005,27(2):145-148. 被引量：12
  • 2毛翔宇,王伟,王玮,陈小兵.不同晶粒取向钛酸铋陶瓷的铁电和压电性能[J].硅酸盐学报,2007,35(3):312-316. 被引量：3
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压电与声光
2007年 第6期

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