MoS_2/Zr复合薄膜的制备及性能研究

Preparation of MoS_2/Zr Composite Coating and Its Performance

采用新型中频磁控溅射技术及多弧离子镀相结合的复合镀膜工艺,在硬质合金YT14基体上制备了MoS2/Zr复合薄膜。采用扫描电子显微镜(SEM)考察MoS2/Zr复合薄膜表面及截面的形貌,利用能谱分析(EDX)薄膜的成分组成。测试涂层的厚度、显微硬度及涂层与基体之间的结合力等性能参数。结果表明:制备的MoS2/Zr复合薄膜结构致密,结合力约为60N,厚度约为2.6μm,硬度约为HV800。

The complex deposited process-which fitted medium-frequency magnetron sputtering together with multi-arc ion plating, was utilized to prepare the MoS2/Zr composite coating on the surface of cemented carbides YT14. SEM was adopted to observe and analyze the surface and cross-section morphologies of composite film. EDX was used to analyze the surface and cross-section component of the composite film. The thickness and hardness and adhesion strength of coating film were tested. The results show that the structure of MoS2/Zr composite film is dense, the adhesion strength is about 60 N, the thickness is about 2.6μm, and the hardness is about HV800.