摘要
The plan view pattern control theoretical models were simplified. Under the condition of constant volume for the plan view pattern compensation, the relation between the thickness and the length can be simplified to the linearity in the segment for the plan view pattern control function. The compensation volume can be dispersed for easy calculation. By comparing the model calculation result with the actual result, it was concluded that the simplified model can be used for the online control process.
The plan view pattern control theoretical models were simplified. Under the condition of constant volume for the plan view pattern compensation, the relation between the thickness and the length can be simplified to the linearity in the segment for the plan view pattern control function. The compensation volume can be dispersed for easy calculation. By comparing the model calculation result with the actual result, it was concluded that the simplified model can be used for the online control process.
基金
Item Sponsored by National Economy Trade Committee Foundation(ZZ0113A040201)
