摘要
本文通过对半导体工业的有机废气净化工艺及设备的分析,总结了各种净化工艺特点和应用的范围,在扩建工程中选择了合理的净化工艺及设备。经过一年的生产验证,有机废气达到国家大气污染物排放标准,与现有废气处理设备相比,节省了投资、降低了运行成本,经济效果明显。
Based on analysis for organic exhasut - gas processes and equipment, sums up characteristics and Applicable scopes of processes and equipment, selects suited process and equipment for extension project. The results of turn out one year show that organic exhasut - gas is achieved emission standard of air pollutants of state. Comparing with old the equipment,save on investment, reduce operation costs, obtain a good economic effect in the new process.
出处
《矿冶》
CAS
2007年第2期78-81,共4页
Mining And Metallurgy
关键词
有机废气
碳吸附
比表面
organic exhasut - gas
carbon adsorption
specific surface
