微型热电制冷器制造技术及其性能

Manufacturing Technology and Performance of Micro Thermoelectric Coolers

介绍了微型热电制冷器的分类以及结构和性能特点,重点阐述了Cross-Plane和In-Plane两类微型热电制冷器的制作工艺及其研究现状。微型热电制冷器的制作工艺复杂,加工难度大,实际制冷性能与理论值还有一定差距。研制高优值系数的热电材料和对结构进行优化设计是提高微型热电制冷器制冷性能的根本途径。

Two types of micro thermoelectric coolers （Micro TEC）, Cross-Plane and In-Plane, and their performances are presented, and their manufacturing development is reviewed. The fabrication of micro thermoelectric coolers is complicated, and the cooling performances are much lower than theoretical values. Using thermoelectric materials with high figure of merit and optimizing structures of Micro TEC are the two ultimate methods to enhance the cooling performance of micro thermoelectric coolers.