摘要
由阴极过程主导的VAD等离子体并不满足局部热力学平衡条件,其中的离子表现出非常强的流动性。本文讨论了这种特殊等离子体气氛下孤立宏观颗粒的荷电特性。根据颗粒半径与电子德拜长度的相对大小,分别对薄鞘层情形和厚鞘层情形计算了宏观颗粒相对于等离子体的平衡电位。
The cathode -governed VAD plasma is not in a local thermal equilibrium condition, and the ion demonstrates high directed velocity in excess of its thermal value.Taking this special plasma feature into account, the charging of an isolated macroparticle(MP) is analyzed. The floating potentials of MPs relative to the plasma are calculated under thin and thick sheath approximations, which are derived according to the comparison between the electron Debye length and MPs'radius.
出处
《微细加工技术》
1997年第2期65-70,共6页
Microfabrication Technology
基金
国家自然科学基金!59577005
关键词
真空电弧涂镀
VAD等离子体
悬浮电位
vacuum arc deposition
macroparticle
plasma sheath
floating potential