压电双晶片执行器驱动位移有限元分析与实验研究

Finite Element Analyses and Experiment Study of Displacement Model for Piezoelectric Bimorph Actuator

采用有限元分析软件对压电悬臂梁驱动位移进行静态分析,同时对驱动器静态位移进行理论计算与实验测试.将有限元分析与理论分析结果和实验测试结果进行对比分析,三者的结果具有良好的一致性,证明了利用有限元分析软件对双晶片悬臂梁结构静态驱动位移分析是正确的,为双晶片结构中压电片和弹性梁的优化设计提供了新方法.

The static displacement of piezoelectric bimorph beam is analyzed of finite element analysis, by using software and experiments and theoretic calculation are conducted. The results show a good compatibility with FEA, prove correctness for the application of FEA in displacement of piezoelectric bimorph beam and provid a new optimium design method for the structure of piezoelectric bimorph beam