摘要
采用真空镀锡膜、锡膜氧化、浸泡掺杂的方法研制了掺ＣａＯ的ＳｎＯ２薄膜气敏元件。对乙醇、丙酮等８种气体的测试结果表明：掺ＣａＯ的气敏元件同未掺杂气敏元件相比，提高了对乙醇的灵敏度和选择性。提出了流过元件电流Ｉ的公式。
The SnO 2 thin film gas sensor containing CaO has been studied,after Sn evaporated,in vacaum,Sn film oxided.The CaO-SnO 2 gas sensor improves the sensitivity and selectivity to C 2H 5OH.The formula of the electric current I which flows through the gas sersor is proposed.lt can half quantitatively explain the experiment phenomina.
出处
《南昌大学学报（理科版）》
CAS
1997年第1期63-66,共4页
Journal of Nanchang University(Natural Science)
基金
江西省自然科学基金
南昌大学基础理论基金
