摘要
本文考察了Ａｌ量对多弧离子镀（ＴｉＸＡｌＹ）Ｎ膜层的硬度、孔隙率、耐磨性、摩擦系数、结合力等因素的影响。并利用扫描电镜、电子探针、Ｘ射线衍射仪及俄歇电子谱仪对膜进行了分析。
In this paper, the effects of Al on the hardness、porosity、wear resistance、friction coefficient and critical normal force of TiAIN coatings deposited by multi arc technique are investigated. The natures of the Ti Al N coatings are analysed by means of SEM、WDS、XRD、AES. And the wear mechanism is preliminarily discussed.
出处
《材料科学与工程》
CSCD
1997年第2期61-64,共4页
Materials Science and Engineering
关键词
多弧离子镀
超硬薄膜
铝
Multi arc ion Coating, (Ti X Al Y )N,Superhard coating
