稳定剂对溶胶凝胶制备的氧化锌薄膜致密度的影响

Effect of Sol Stabilizer on the Density of Sol-gel Derived ZnO Films

采用溶胶凝胶法制备了ZnO薄膜,利用扫描电镜(SEM)和X射线衍射(XRD)对薄膜的表面形貌和晶体结构进行了表征。并通过紫外可见分光光度计测量了薄膜在可见光区的透过率,根据这一结果计算了薄膜的相对致密度,结果表明:采用不同的稳定剂时,薄膜的形貌、择优取向以及相对致密度均会发生变化;单乙醇胺作为稳定剂时,薄膜的致密度和择优取向最好。初步探讨了稳定剂对薄膜的致密度的影响。

In the present work, zinc oxide thin films were prepared by sol gel method with different sol stabilizers. The morphology of surface and crystal structure of films were characterized by means of SEM and XRD, while the transmittance in the visible light region was measured by UV-VIS spectrophotometer and the relative density was calculated based on the measured values. The results showed that sol stabilizer has a little effect on the morphology, preferential orientation and relative density and the better orientation and higher density can be obtained when MEA acts as sol stabilizer. The reason for that was discussed preliminarily.