Nb_2O_5薄膜的溶胶凝胶法制备

Nb 2O 5 THIN FILMS PREPARED BY SOLGEL METHOD

以金属醇盐（Ｎｂ（ＯＥｔ）５）为前驱体获得涂膜液，采用浸渍提拉法（ｄｉｐ－ｃｏａｔｉｎｇ）制备Ｎｂ２Ｏ５薄膜；研究了不同催化环境对涂膜液溶胶的影响，不同涂膜次数样品的反射透过情况，并由此推算了薄膜的厚度及折射率。ＸＲＤ结果表明：５６０℃热处理１ｈ后得到正交晶相的Ｎｂ２Ｏ５薄膜；Ｎｂ２Ｏ５薄膜着色为淡黄色。

Homogenious and transparent Nb 2O 5 films were made by dipcoating.Using metal alkoxide (Nb(OEt) 5) as precursor,the dipping sol was obtained.through TEM photographic observation.Particle size became larger when total flow rate decreased.It was difficult to get SiC particles below 5nm.SiC particles with about 10nm in size and with low aggregation were synthesized under 1000mL/min.Particles grow and deform after the homogeneous nucleation through heterogeneous nucleation,coagulation,and occasional remelting.