摘要
Nowadays,X-ray opticsis regarded as one of the most i mportant fieldsin optics .It can effectively extend the application of the modern optics to satisfy theincreasing requirements for the
Nowadays, X-ray optics is regarded as one of the most important fields in optics. It can effectively extend the application of the modern optics to satisfy the increasing requirements for the fabrication of high volume integrated circuits,
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2007年第12期I0001-I0001,共1页
Optics and Precision Engineering