低温共烧氧化铝/玻璃复合基板材料的研究

Study of Low Temperature Cofired Al_2O_3/Glass Composite Substrate Material

以低软化点的钙硼硅酸盐玻璃和氧化铝粉末为原料,制备了氧化铝/玻璃低温共烧复合基板材料。所需的玻璃粉体采用溶胶-凝胶法制备。研究了烧结温度和氧化铝含量对复合材料的烧结特性、介电性能以及力学性能的影响。结果表明,当氧化铝质量分数为50%,复合材料经950℃、保温2 h烧结后,其εr=5.92,tanδ=5.7×10-4,ρ=1012Ω.cm,抗弯强度σ=167.82 MPa,热膨胀系数α=4.86×10-6/℃,可望作为低温共烧多层陶瓷基板材料应用。

The AlaO3/glass low temperature sintering composite substrate material was prepared with low softening temperature CaO-B203-SiO2 glass and A1203 powder as raw materials. The glass powder is prepared by sol-gel method. The influence of sin- tering temperature and the A1203 content on the sintering properties,dielectric properties and mechanical properties was investi- gated. The results show that when the A1203 content is 50 % and after the composite material were sintered at 950℃ for 2 hours, the er reaches 5.92, tan8 reaches 5.7 × 10^-4, the insulation resistivity reaches 10^12Ω·cm, flexural strength a reaches 167.82 MPa and thermal expand coefficient a reaches 4.86 x 10^-6/℃. This composite material is hopeful to have application in low temperature sintering multilayer ceramic substrate.