热处理对SnO_2胶体薄膜结构和气敏性能的影响

INFLUENCE OF HEAT TREATMENT ON STRUCTURE AND GAS SENSITIVITY OF SnO 2 THIN FILM PREPARED BY SOL GEL METHOD

采用Ｓｏｌｇｅｌ方法制备ＳｎＯ２胶体气敏薄膜，在４００～８０００Ｃ范围对薄膜进行了热处理。ＸＲＤ和ＸＰＳ分析表明热处理前后薄膜由非晶态转变为多晶的金红石结构。在较高温度下处理的薄膜比在较低温度下处理的薄膜有更好的结晶度，稳定性有所提高，但对气体的灵敏度下降。

SnO 2 thin film were prepared by sol gel method, then heat treatmentwere carried out in the range between 400 0C and 800 0C. XRD and XPS analysis proved that the thin film changes from amorphous to poly crystalline rutile structure after heat treatment. The filmtreated at higher temperature has more perfect crystalline form, betterstability and lower sensitivity.