摘要
采用Solgel方法制备SnO2胶体气敏薄膜,在400~8000C范围对薄膜进行了热处理。XRD和XPS分析表明热处理前后薄膜由非晶态转变为多晶的金红石结构。在较高温度下处理的薄膜比在较低温度下处理的薄膜有更好的结晶度,稳定性有所提高,但对气体的灵敏度下降。
SnO 2 thin film were prepared by sol gel method, then heat treatmentwere carried out in the range between 400 0C and 800 0C. XRD and XPS analysis proved that the thin film changes from amorphous to poly crystalline rutile structure after heat treatment. The filmtreated at higher temperature has more perfect crystalline form, betterstability and lower sensitivity.
出处
《功能材料与器件学报》
CAS
CSCD
1997年第3期203-207,共5页
Journal of Functional Materials and Devices
关键词
热处理
晶态
气敏性
氧化锡
薄膜
Heat treatment, Crystalline SnO 2, Gas sensitivity