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氧气-乙炔火焰法在Al_2O_3陶瓷上沉积金刚石薄膜 被引量:2

Deposition of Diamond Films on Alumina Ceramics by Oxygen-Acetylene Flame
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摘要 用氧气-乙炔火焰法在氧化铝陶瓷片上沉积出了金刚石薄膜,并观察了薄膜的形貌结构及其在基片上的分布规律.对基片进行适当的预处理,可以提高金刚石薄膜在基片上的成核密度.认为氧化铝陶瓷片与沉积金刚石薄膜之间易形成过渡层,初步探讨了在氧化铝陶瓷片上沉积金刚石薄膜的机理. Dianmond films were deposited on Al2O3 ceramic substrates by oxygen-acetylene flame, the morphologics and their distribution of deposited films on the substrate surfaces were also observed.Proper pretreatment of substrates can increase the density of diamond nuclei. An intermediate eas-ily be formed betweem Al2O3 ceramics and deposited diamond filmes. The mechanism of depositing diamond films on Al2O3 ceramics was preliminary analyzed.
出处 《无机材料学报》 SCIE EI CAS CSCD 北大核心 1997年第4期613-616,共4页 Journal of Inorganic Materials
基金 国家自然科学基金!19474035
关键词 氧化铝陶瓷 金刚石薄膜 氧气 乙炔火焰 沉积 Al2O3 ceramics, diamond film, oxygen-acetylene flame
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参考文献1

  • 1王若宝,薄膜科学与技术,1992年,6卷,1期,1页

同被引文献29

  • 1王林军,方志军,张明龙,沈沪江,夏义本.金刚石膜/氧化铝陶瓷复合材料的介电特性和热学性能研究[J].无机材料学报,2004,19(4):902-906. 被引量:10
  • 2楼燕燕,王林军,张明龙,顾蓓蓓,苏青峰,夏义本.Al_2O_3陶瓷上金刚石膜生长工艺优化及α粒子响应[J].Journal of Semiconductors,2005,26(4):740-744. 被引量:3
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  • 7Xu Zhenqing, Leonid Lev, Michael Lukitsch, et al. Effects of surface pretreatments on the deposition of adherent diamond coatings on cemented tungsten carbide substrates[J]. Diamond Related Mater, 2007,16: 461.
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