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Comparison of measurements and simulation results in 300mm CZ silicon crystal growth 被引量:3

Comparison of measurements and simulation results in 300mm CZ silicon crystal growth
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摘要 A special thennat modeling tool, CrysVUn, which was developed by Crystal Growth Laboratory (CGL) of Fraunhofer Institute of Integrated Systems and Devices Technology in Erlangen of Germany, was used for numerical analysis of growth interface situation. The heat transportation, argon flow and melt convection have been considered. Cauchy's first and second laws of motion have been the governing partial equations for stress calculation. The measurement results and simulation results were compared and the interface shape and thennat stress distribution during 300 mm Czochralski (CZ) silicon crystal growth with different growth rates were predicted. A special thennat modeling tool, CrysVUn, which was developed by Crystal Growth Laboratory (CGL) of Fraunhofer Institute of Integrated Systems and Devices Technology in Erlangen of Germany, was used for numerical analysis of growth interface situation. The heat transportation, argon flow and melt convection have been considered. Cauchy's first and second laws of motion have been the governing partial equations for stress calculation. The measurement results and simulation results were compared and the interface shape and thennat stress distribution during 300 mm Czochralski (CZ) silicon crystal growth with different growth rates were predicted.
出处 《Rare Metals》 SCIE EI CAS CSCD 2007年第6期607-610,共4页 稀有金属(英文版)
基金 the International Scientific and Technical Corporation Major Planning Project (No. 2005DFA5105).
关键词 SILICON simulation INTERFACE growth rate silicon simulation interface growth rate
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参考文献14

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